Universal MEMS platforms for passive RF components: suspended inductors and variable capacitors

TitoloUniversal MEMS platforms for passive RF components: suspended inductors and variable capacitors
Publication TypeConference Paper
Year of Publication1998
AuthorsFan, L., R. T. Chen, A. Nespola, and M. C. Wu
Conference NameMicro Electro Mechanical Systems, 1998. MEMS 98. Proceedings., The Eleventh Annual International Workshop on
Date Publishedjan
Keywordscapacitors, high-Q inductors, inductors, integrable passive components fabrication, MESA actuators, micro-elevator by self-assembly technique, microactuators, microassembling, microhinges, micromachining, monolithic integration, passive networks, passive RF components, radio equipment, resonant frequency, RF integrated circuits, spiral inductor, surface-micromachined, suspended inductors, universal MEMS platforms, variable capacitors, wireless communication circuits
DOI10.1109/MEMSYS.1998.659724